Organic light-emitting display device

ABSTRACT

An organic light-emitting display device comprises a substrate, a driving thin-film transistor including an active layer on the substrate, source and drain electrodes directly contacting the active layer, and a gate electrode on the active layer, and an organic light-emitting element connected to the driving thin-film transistor. Each of the source and drain electrodes of the driving thin-film transistor exposes a respective side surface of the active layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of Korean Patent Application No.10-2018-0111823, filed in Korea on Sep. 18, 2018, which is herebyincorporated by reference as if fully set forth herein.

BACKGROUND Technical Field

The present disclosure relates to an organic light-emitting displaydevice, and more particularly, to an organic light-emitting displaydevice for simplifying the structure and manufacturing process thereof.

Discussion of the Related Art

An image display device, which displays various pieces of information ona screen, is a core technology of the information and communication age,and is being developed to be thinner, lighter, more portable, and higherperforming. Hence, organic light-emitting display devices, which arecapable of overcoming the problems of disadvantageous weight and volumeassociated with a cathode ray tube (CRT), are attracting attention.Organic light-emitting display (OLED) devices may be self-illuminatingdevices and have low power consumption, a high response speed, highluminance efficiency, high brightness, and a wide viewing angle. SuchOLED devices display an image using a plurality of subpixels, which arearranged in a matrix form. Each of the subpixels includes alight-emitting element and a pixel-driving circuit having multipletransistors that implement independent driving of the light-emittingelement.

Typically, in order to manufacture an OLED device, a mask process usinga photomask is performed a plurality of times. Each mask process mayinvolve subprocesses, such as washing, exposure, developing, and etchingprocesses. To this end, whenever an additional mask process is added,the time and costs for the manufacture of the OLED device increase, andthe rate of generation of defective products increases, which results ina lower production yield. Therefore, there is a demand for a simplifiedstructure and manufacturing process in order to reduce production costsand to enhance production yield and production efficiency.

SUMMARY OF THE DISCLOSURE

Accordingly, the present disclosure is directed to an organiclight-emitting display device that substantially obviates one or moreproblems due to the limitations and disadvantages of the related art.

An object of the present disclosure is to provide an organiclight-emitting display device for simplifying the structure andmanufacturing process thereof.

Additional advantages, objects, and features of the disclosure will beset forth in part in the description which follows and in part willbecome apparent to those having ordinary skill in the art uponexamination of the following or may be learned from practice of thedisclosure. The objectives and other advantages of the disclosure may berealized and attained by the structure particularly pointed out in thewritten description and claims hereof as well as the appended drawings.

To achieve these objects and other advantages and in accordance with thepurpose of the disclosure, as embodied and broadly described herein, anorganic light-emitting display device comprises a substrate; a drivingthin-film transistor including an active layer on the substrate, sourceand drain electrodes directly contacting the active layer, and a gateelectrode on the active layer; and an organic light-emitting elementconnected to the driving thin-film transistor, wherein each of thesource and drain electrodes of the driving thin-film transistor exposesa respective side surface of the active layer.

Accordingly, because each of the source and drain electrodes and theactive layer are directly connected to each other without a separatecontact hole, it is possible to reduce the total number of contact holesand thus improve an aperture ratio. In addition, because the number ofmask processes is reduced, it is possible to simplify the structure andmanufacturing process of the device and consequently achieve enhancedproductivity.

It is to be understood that both the foregoing general description andthe following detailed description of the present disclosure areexemplary and explanatory and are intended to provide furtherexplanation of the disclosure as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the disclosure and are incorporated in and constitute apart of this application, illustrate embodiments of the disclosure andtogether with the description serve to explain the principles of thedisclosure. In the drawings:

FIG. 1 is a plan view illustrating an organic light-emitting displaydevice according to a first embodiment of the present disclosure;

FIG. 2 is a plan view illustrating the unit pixel illustrated in FIG. 1;

FIG. 3 illustrates cross-sectional views taken along lines I-I′, II-II′and III-III′ in the organic light-emitting display device illustrated inFIG. 2 .

FIGS. 4A to 4G are cross-sectional views illustrating a method ofmanufacturing the organic light-emitting display device illustrated inFIG. 3 ;

FIG. 5 is a cross-sectional view illustrating another example of thegate insulation film illustrated in FIG. 3 ;

FIG. 6 is a plan view illustrating a unit pixel of an organiclight-emitting display device according to a second embodiment of thepresent disclosure;

FIG. 7 illustrates cross-sectional views taken along lines IV-IV′, V-V′and VI-VI′ in the organic light-emitting display device illustrated inFIG. 6 ; and

FIGS. 8A to 8C are cross-sectional views illustrating a method ofmanufacturing the gate insulation film and the planarization layerillustrated in FIG. 7 .

DETAILED DESCRIPTION

Reference will now be made in detail to some embodiments of the presentdisclosure, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers will be usedthroughout the drawings to refer to the same or like parts.

FIG. 1 is a plan view illustrating an organic light-emitting displaydevice according to a first embodiment of the present disclosure.

The organic light-emitting display device illustrated in FIG. 1 includesan active area AA and a pad area PA. In the pad area PA, as illustratedin FIGS. 2 and 3 , there is provided a scan pad SPD, which supplies adriving signal to a scan line SL disposed in the active area AA, a datapad 140, which supplies a driving signal to a data line DL, and a powersource pad VPD, which supplies a driving signal to each of ahigh-potential voltage VDD supply line VDL and a low-potential voltageVSS supply line VSL.

At least one conductive pad among the scan pad SPD, the data pad 140, orthe power source pad VPD includes a lower pad electrode 142 and an upperpad electrode 144.

The lower pad electrode 142 is formed of the same material as source anddrain electrodes 106, 108, 156 and 158 on an active layer 148. The lowerpad electrode 142 has the same line width and shape as the active layer.

The upper pad electrode 144 is electrically connected to a portion ofthe lower pad electrode 142 that is exposed through a pad contact hole146 penetrating a gate insulation film 114. The upper pad electrode 144is formed as a transparent conductive layer 160 a, which is the same asthat of an anode 132. The upper pad electrode 144 has the same linewidth and shape as the gate insulation film 114, which is disposed underthe upper pad electrode 144.

The active area AA displays an image through unit pixels, each of whichincludes a light-emitting element 130. For example, each unit pixelincludes red (R), green (G), and blue (B) subpixels SP, or includes red(R), green (G), blue (B), and white (W) subpixels SP.

Data lines DL are disposed between the red (R) and white (W) subpixelsSP and between the green (G) and blue (B) subpixels. A high-potentialvoltage line VDL for supplying a high-potential voltage VDD is disposedbetween the green (G) and red (R) subpixels SP, and the high-potentialvoltage VDD is supplied to the green (G) and red (R) subpixels SP viathe high-potential voltage line VDL. The high-potential voltage VDD issupplied to the white (W) and blue (B) subpixels SP via a firstconnection part 164, which is connected to the high-potential voltageline VDL. A low-potential voltage line VSL for supplying a low-potentialvoltage VSS is disposed between the white (W) and blue (B) subpixels SP,and the low-potential voltage VSS is supplied to the white (W) and blue(B) subpixels SP via the low-potential voltage line VSL. Thelow-potential voltage VSS is supplied to the green (G) and red (R)subpixels SP via a second connection part 166, which is connected to thelow-potential voltage line VSL. Alternatively, instead of thelow-potential voltage line VSL, a reference voltage line for supplying areference voltage Vref, which is used in a sensing mode, may bedisposed.

A gate insulation film 114 and a planarization layer 116 are disposed onthe intersection between a vertical line, which includes at least one ofthe data line DL, the low-potential voltage line VSL, or thehigh-potential voltage line VDL, which extends in the verticaldirection, and a horizontal line, which includes at least one of thescan line SL, the first connection part 164, or the second connectionpart 166, which extends in the horizontal direction. Thus, it may bepossible to prevent the occurrence of a short circuit at theintersection between the vertical line and the horizontal line.

Each subpixel includes a light-emitting element 130 and a pixel-drivingcircuit that implements independent driving of the light-emittingelement 130. The pixel-driving circuit includes a switching thin-filmtransistor TS, a driving thin-film transistor TD, and a storagecapacitor Cst.

When a scan pulse is supplied to the scan line SL, the switchingthin-film transistor TS is turned on, and supplies the data signalsupplied to the data line DL to the storage capacitor Cst and to a gateelectrode of the driving thin-film transistor TD.

The driving thin-film transistor TD controls the current I to besupplied from the high-potential voltage VDD supply line VDL to thelight-emitting element 130 in response to the data signal supplied tothe gate electrode of the driving thin-film transistor TD, therebyadjusting the amount of light emitted from the light-emitting element130. Then, even if the switching thin-film transistor TS is turned off,the driving thin-film transistor TD maintains the emission of light bythe light-emitting element 130 by supplying a constant amount of currentI thereto using the voltage charged in the storage capacitor Cst until adata signal of a next frame is supplied.

Each of the switching thin-film transistor TS and the driving thin-filmtransistor TD, as illustrated in FIGS. 2 and 3 , includes a gateelectrode 152 and 102, a source electrode 156 and 106, a drain electrode158 and 108, and an active layer 154 and 104.

The gate electrode 152 and 102 is formed on the gate insulation film114, which has the same shape as the gate electrode 152 and 102. Thegate electrode 152 and 102 overlaps a channel region of the active layer154 and 104, with the gate insulation film 114 interposed therebetween.Each of the gate electrode 152 and 102, the scan line SL, and the firstand second connection parts 164 and 166 includes a transparentconductive layer 160 a and an opaque conductive layer 160 b disposed onthe transparent conductive layer 160 a. The transparent conductive layer160 a is formed of a transparent material, such as indium-tin-oxide(ITO) or indium-zinc-oxide (IZO), which is the same material as theanode 132. The opaque conductive layer 160 b has the same shape as thetransparent conductive layer 160 a. The opaque conductive layer 160 bmay have a single-layer or multi-layer structure, and may be formed of amaterial selected from the group consisting of aluminum (Al), chrome(Cr), gold (Au), nickel (Ni), neodymium (Nd), copper (Cu), and alloysthereof, without being limited thereto.

The source electrode 156 and 106 is disposed on the active layer 154 and104 so as to expose the side surface of the active layer 154 and 104,and is in direct contact with the active layer 154 and 104 without aseparate contact hole. The entire lower surface of the source electrode106 and 156 is in direct contact with a source region 154S and 104S ofthe active layer 154 and 104. The source electrode 106 of the drivingthin-film transistor TD is directly connected to the high-potentialsupply line VDL, or is connected to the first connection part 164through the source contact hole 162 penetrating the gate insulation film114.

Similarly, the drain electrode 108 and 158 is disposed on the activelayer 154 and 104 so as to expose the side surface of the active layer154 and 104, and is in direct contact with the active layer 154 and 104without a separate contact hole. The entire lower surface of the drainelectrode 108 and 158 is in direct contact with a drain region 154D and104D of the active layer 154 and 104.

The drain electrode 108 of the driving thin-film transistor TD isexposed through a pixel contact hole 120 penetrating the gate insulationfilm 114, and is connected to the anode 132.

Each of the source electrode 156 and 106 and the drain electrode 158 and108 is formed of a conductive layer having corrosion resistance toetching gas of the gate insulation film 114. For example, each of thesource electrode 156 and 106 and the drain electrode 158 and 108 mayhave a single-layer or multi-layer structure, and may be formed of amaterial selected from the group consisting of aluminum (Al), copper(Cu), and an alloy thereof, without being limited thereto. Thus, whenthe pixel contact hole 120 is formed in order to expose the drainelectrode 158 and 108, even if the gate insulation film 114 isover-etched, it may be possible to prevent the drain electrode 158 and108 from being lost.

The active layer 154 and 104 includes a channel region 154C and 104C,and further includes a source region 154S and 104S and a drain region154D and 104D, which face each other with the channel region 154C and104C interposed therebetween. The channel region 154C and 104C overlapsthe gate electrode 152 and 102, with the gate insulation film 114interposed therebetween, and forms a channel between the source anddrain electrodes 156, 106, 158, and 108. The source region 154S and 104Sis a region that is made conductive and that is directly connected tothe source electrode 156 and 106. Similarly, the drain region 154D and104D is a region that is made conductive and that is directly connectedto the drain electrode 158 and 108.

The active layer 154 and 104 is formed on a buffer film 112 and isformed of at least one of an oxide semiconductor material, apolycrystalline semiconductor material, or an amorphous semiconductormaterial, which includes at least one material selected from the groupconsisting of Zn, Cd, Ga, In, Sn, Hf, and Zr. The buffer film 112 isformed on a substrate 101, which is formed of glass or plastic resinsuch as polyimide (PI), and is formed in a single-layer or multi-layerstructure using silicon oxide or silicon nitride. The buffer layer 112serves to prevent the diffusion of moisture or impurities generated inthe substrate 101 and/or to control a heat transfer rate duringcrystallization so that the active layer 154 and 104 may be crystallizedwell.

In order to prevent external light from being incident on the channelregion 154C and 104C of at least one of the switching thin-filmtransistor TS and the driving thin-film transistor TD, a light-shieldinglayer 124 is formed on the substrate 101 and the buffer layer 112. Forexample, the light-shielding layer 124 may selectively overlap thedriving thin-film transistor TD, which controls the current that issupplied to the light-emitting element 130, rather than the switchingthin-film transistor TS, which performs a switching function.

The light-shielding layer 124 is exposed by a light-shielding hole 122penetrating the gate insulation film 114 and the buffer layer 112, andis electrically connected to the anode 132. Accordingly, thelight-shielding layer 124 has the same potential as the anode 132without floating, and thus does not have an influence on the driving ofthe driving thin-film transistor TD, which is disposed so as to overlapthe light-shielding layer 124.

The storage capacitor Cst is formed as a result of overlapping the drainelectrode 158 of the switching thin-film transistor TS and a storageelectrode 126 with the gate insulation film 114 interposed therebetween.The storage electrode 126 is formed of a transparent conductive layer160 a, which is the same as that of the anode 132. The storage electrode126 is disposed on the gate insulation film 114 and is connected to thedrain electrode 108 of the driving thin-film transistor TD. A protectivefilm 118 and a bank 138 are sequentially disposed on the storageelectrode 126.

Even when the switching thin-film transistor TS is turned off, thedriving thin-film transistor TD maintains the emission of light by thelight-emitting element 130 by supplying a constant amount of currentthereto using the voltage charged in the storage capacitor Cst until adata signal of a next frame is supplied.

The light-emitting element 130 includes an anode 132, which is connectedto the drain electrode 108 of the driving thin-film transistor TD, atleast one light-emitting stack 134, which is formed on the anode 132,and a cathode 136, which is formed on the light-emitting stack 134 so asto be connected to the low-potential voltage VSS supply line VSL. Here,the low-potential voltage VSS supply line VSL supplies low-potentialvoltage VSS that is lower than the high-potential voltage VDD.

Because the anode 132 is formed through the same mask process as thegate electrode 152 and 102 and the scan line SL, the anode 132 is formedof a transparent conductive layer 160 a, such as indium-tin-oxide (ITO)or indium-zinc-oxide (IZO), which is included in the gate electrode 152and 102. The upper surface of the anode 132 is exposed by an emissionhole EH penetrating the bank 138 which defines an emission region.

The light-emitting stack 134 is formed by stacking a hole transportlayer, an emission layer, and an electron transport layer on the anode132 in that order or in the reverse order.

The cathode 136 is formed on the upper surfaces and the side surfaces ofthe light-emitting stack 134 and the bank 138 so as to face the anode132, with the light-emitting stack 134 interposed therebetween. In thecase in which the cathode 136 is applied to a bottom-emission-typeorganic light-emitting display device, the cathode 136 is formed in amulti-layer structure including a transparent conductive layer and anopaque conductive layer having high reflection efficiency. Thetransparent conductive layer is formed of a material having a relativelyhigh work function, such as indium-tin-oxide (ITO) or indium-zinc-oxide(IZO), and the opaque conductive layer is formed in a single-layer ormulti-layer structure including a material selected from the groupconsisting of Al, Ag, Cu, Pb, Mo, Ti, and alloys thereof. For example,the cathode 136 is formed in a structure such that a transparentconductive layer, an opaque conductive layer, and a transparentconductive layer are sequentially stacked.

A color filter 128 is disposed on the gate insulation film 114 so as tooverlap the emission region defined by the bank 138. Any one of a red(R) color filter, a green (G) color filter, and a blue (B) color filteris disposed in each subpixel. That is, a red color filter 128 isdisposed in the red (R) subpixel, a green color filter 128 is disposedin the green (G) subpixel, and a blue color filter 128 is disposed inthe blue (B) subpixel. Accordingly, white light generated in thelight-emitting stack 134 passes through the color filter 128, wherebythe color filter 128 realizes colored light corresponding thereto. Thecolor filter 128 may extend so as to cover at least one of the switchingthin-film transistor TS or the driving thin-film transistor TD, and mayabsorb external light. The color filter 128 may also prevent externallight from being incident on the active layer 154 and 104 of theswitching and driving thin-film transistors TS and TD.

As such, when the light-emitting stack 134 generates white light, thewhite light generated by the light-emitting stack 134 is incident on thecolor filter 128, thereby realizing a color image. Alternatively, eachlight-emitting stack 134 may realize a color image without a colorfilter 128 by generating colored light corresponding to a respective oneof the subpixels. That is, the light-emitting stack 134 of the red (R)subpixel may generate red light, the light-emitting stack 134 of thegreen (G) subpixel may generate green light, and the light-emittingstack 134 of the blue (B) subpixel may generate blue light.

The planarization layer 116 is formed of a transparent organicinsulation material such as acrylic resin for planarization on thesubstrate 101, on which the color filter 128 has been formed. Theplanarization layer 116 serves as a white color filter in the whitesubpixel, in which the color filter 128 is not formed. The planarizationlayer 116 is disposed at the intersection between the vertical line(e.g. the data line DL) and the horizontal line (e.g. the scan line SL)and in the emission region in which the color filter 128 is disposed.The planarization layer 116 is not formed in a driving circuit region Ain which the switching and driving thin-film transistors TS and TD aredisposed so as not to overlap the driving circuit region in which theswitching and driving thin-film transistors TS and TD are disposed.

According to embodiments of the present disclosure, the lower padelectrode 142 and each of the source and drain electrodes 156, 106, 158and 108 are disposed on the active layer 154, 104 and 148 so as toexpose the side surface of the active layer 154, 104 and 148. That is,the lower pad electrode 142 and each of the source and drain electrodes156, 106, 158 and 108 are directly connected to the active layer 154,104 and 148 without a separate contact hole. Accordingly, embodiments ofthe present disclosure may be capable of reducing the total number ofcontact holes, and thus, improving an aperture ratio.

In addition, according to embodiments of the present disclosure, thedata line, the lower pad electrode 142, the source electrode 156 and106, the drain electrode 158 and 108, and the active layer 154, 104 and148 are formed through the same mask process, and the scan line SL, thegate electrode 152 and 102, the storage electrode 126, the upper padelectrode 144, and the anode 132 are formed through the same maskprocess. Accordingly, the present disclosure may reduce the number ofmask processes by a total of at least two times compared to the relatedart, thereby simplifying the structure and manufacturing process of thedevice and consequently achieving enhanced productivity.

FIGS. 4A to 4G are cross-sectional views illustrating a method ofmanufacturing the organic light-emitting display device illustrated inFIG. 3 .

With reference to FIG. 4A, the light-shielding layer 124 is formed onthe substrate 101. For example, after a first conductive layer isdeposited on the entire surface of the substrate 101, the firstconductive layer is patterned through a photolithography process and anetching process, thereby forming the light-shielding layer 124.

With reference to FIG. 4B, the buffer layer 112 is formed on thesubstrate 101, on which the light-shielding layer 124 has been formed.The active layer 148, 154 and 104, the lower pad electrode 142, the dataline DL, the source electrode 156 and 106, and the drain electrode 158and 108 are formed on the buffer layer 112 through the same maskprocess.

For example, the buffer layer 112 is formed by depositing an inorganicinsulation material such as SiOx or SiNx on the entire surface of thesubstrate 101, on which the light-shielding layer 124 has been formed.Subsequently, the active layer 154 and 104 and a second conductive layerare sequentially stacked on the substrate 101, on which the buffer layer112 has been formed. When the active layer 154 and 104 is deposited, theflow rate of at least one of oxygen or hydrogen is controlled so as toform the conductive active layer 154 and 104. For example, when theactive layer 154 and 104 is deposited, the conductive active layer 154and 104 is formed by decreasing the relative flow rate of oxygen orincreasing the relative flow rate of hydrogen.

Subsequently, a photoresist pattern having a multi-stage structure isformed on the second conductive layer through a photolithography processusing a halftone mask. The active layer 154 and 104 and the secondconductive layer are simultaneously patterned through an etching processusing the photoresist pattern having a multi-stage structure as a mask.Accordingly, the lower pad electrode 142, the data line DL, the sourceelectrode 156 and 106, and the drain electrode 158 and 108 are formed onthe active layer 154 and 104 so as to have the same shape as the activelayer 154 and 104.

Subsequently, the second conductive layer, which is disposed between thesource electrode 156 and 106 and the drain electrode 158 and 108, isexposed by ashing the photoresist pattern having a multi-stagestructure. The exposed second conductive layer is removed through anetching process using the ashed photoresist pattern as a mask. As aresult, the source and drain electrodes 156, 106, 158, and 108 areseparated from each other, and the active layer 154 and 104 is exposedbetween the source and drain electrodes 156, 106, 158, and 108.

With reference to FIG. 4C, the gate insulation film 114 is formed on thesubstrate 101, on which the active layer 148, 154 and 104, the lower padelectrode 142, the data line DL, the source electrode 156 and 106, andthe drain electrode 158 and 108 have been formed. In addition, the colorfilter 128 is formed on the gate insulation film 114.

For example, the gate insulation film 114 is formed by depositing aninorganic insulation material such as SiOx or SiNx on the entire surfaceof the substrate 101, on which the active layer 148, the lower padelectrode 142, the data line DL, the source electrode 156 and 106, andthe drain electrode 158 and 108 have been formed. When the gateinsulation film 114 is deposited, the flow rate of oxygen is increasedmore than in the process of depositing the active layer 154 and 104, orthe flow rate of hydrogen is decreased more than in the process ofdepositing the active layer 154 and 104. Accordingly, the active layer154 and 104, which is exposed between the source and drain electrodes156, 106, 158 and 108, is changed from the conductor state to asemiconductor state. That is, the source region 154S and 104S thatcontacts the source electrode 156 and 106 is maintained in the conductorstate, which was realized in the process of depositing the active layer154 and 104, the drain region 154D and 104D that contacts the drainelectrode 158 and 108 is maintained in the conductor state, which wasrealized in the process of depositing the active layer 154 and 104, andthe portion of the active layer 154 and 104 that is exposed between thesource and drain electrodes 156, 106, 158 and 108 is changed to thechannel region 154C and 104C in a semiconductor state.

Subsequently, color resin is applied on the gate insulation film 114,and is then patterned through a photolithography process, therebyforming the color filter 128.

With reference to FIG. 4D, the planarization layer 116 is formed on thesubstrate 101, on which the color filter 128 has been formed. Forexample, an organic film such as photo-acrylic resin is applied on theentire surface of the substrate 101, on which the color filter 128 hasbeen formed, and is then patterned through a photolithography process,thereby forming the planarization layer 116. The planarization layer 116is disposed on the intersection between the vertical line DL and thehorizontal line SL and in the emission region in which the color filter128 is disposed, but is not disposed in the driving circuit region inwhich the switching and driving thin-film transistors TS and TD aredisposed.

With reference to FIG. 4E, the pad contact hole 146, the source contacthole 162, the pixel contact hole 120, and the light-shielding contacthole 122 are formed on the substrate 101, on which the planarizationlayer 116 has been formed. For example, the gate insulation film 114,which is disposed on the substrate 101 having the planarization layer116 formed thereon, is patterned through a photolithography process andan etching process, thereby forming the pad contact hole 146, the sourcecontact hole 162, the pixel contact hole 120, and the light-shieldingcontact hole 122. Here, the pad contact hole 146, the source contacthole 162, and the pixel contact hole 120 penetrate the gate insulationfilm 114 and expose the lower pad electrode 142 and the source and drainelectrodes 106 and 108 of the driving thin-film transistor TD,respectively. The light-shielding contact hole 122 penetrates the bufferlayer 112 and the gate insulation film 114 and exposes thelight-shielding layer 124.

With reference to FIG. 4F, the upper pad electrode 144, the scan lineSL, the gate electrode 152 and 102, the storage electrode 126, the firstconnection part 164, and the anode 132 are formed on the substrate 101,in which the pad contact hole 146, the source contact hole 162, thepixel contact hole 120, and the light-shielding contact hole 122 havebeen formed.

For example, the transparent conductive layer 160 a and the opaqueconductive layer 160 b are sequentially formed on the substrate 101, inwhich the pad contact hole 146, the source contact hole 162, the pixelcontact hole 120, and the light-shielding contact hole 122 have beenformed. The transparent conductive layer 160 a is formed of atransparent conductive material such as ITO. The opaque conductive layer160 b is formed in a single-layer or multi-layer structure including ametal material selected from the group consisting of Mo, Ti, Cu, AlNd,Al, Cr, and alloys thereof. Subsequently, a photoresist pattern having amulti-stage structure is formed through a photolithography process usinga halftone mask. The transparent conductive layer 160 a, the opaqueconductive layer 160 b, and the gate insulation film 114 aresimultaneously patterned through an etching process using thephotoresist pattern having a multi-stage structure as a mask.Accordingly, each of the upper pad electrode 144, the scan line SL, thegate electrode 152 and 102, the storage electrode 126, the firstconnection part 164, and the anode 132 is formed in a structure in whichthe transparent conductive layer 160 a and the opaque conductive layer160 b are sequentially stacked. The gate insulation film 114 is formedin the regions overlapping the upper pad electrode 144, the scan lineSL, the gate electrode 152 and 102, the storage electrode 126, the firstconnection part 164, and the anode 132.

Subsequently, the opaque conductive layer 160 b, which is included ineach of the upper pad electrode 144, the storage electrode 126 and theanode 132, is exposed by ashing the photoresist pattern having amulti-stage structure. The exposed opaque conductive layer 160 b isremoved through an etching process using the ashed photoresist patternas a mask. Accordingly, each of the upper pad electrode 144, the storageelectrode 126, and the anode 132 is formed as the transparent conductivelayer 160 a.

The gate insulation film 114 is also dry-etched during the process ofdry-etching the opaque conductive layer 160 b and the transparentconductive layer 160 a, which form the upper pad electrode 144, the scanline SL, the gate electrode 152 and 102, the storage electrode 126, thefirst connection part 164, and the anode 132. At this time, the channelregion between each of the source and drain electrodes 156, 106, 108,and 158 and the gate electrode 152 and 102 is exposed to etching gasused in the dry-etching process. As a result, a bond between metal andoxygen that form the channel region between each of the source and drainelectrodes 156, 106, 108 and 158 and the gate electrode 152 and 102 isdestroyed, and the oxygen is separated from the metal. In this case,vacancies are generated in the metal due to the separation of theoxygen, and free electrons are generated. Thus, the channel regionbetween the source electrode 156 and 106 and the gate electrode 152 and102 becomes the conductive source region 154S and 104S, the channelregion between the drain electrode 108 and 158 and the gate electrode152 and 102 becomes the conductive drain region 154D and 104D, and onlythe active layer disposed under the gate electrode 152 and 102 is usedas the channel region 154C and 104C.

With reference to FIG. 4G, the protective film 118, the bank 138, thelight-emitting stack 134, and the cathode 136 are formed on thesubstrate 101, on which the upper pad electrode 144, the scan line SL,the gate electrode 152 and 102, the storage electrode 126, the firstconnection part 164, and the anode 132 have been formed.

For example, the protective film 118 is formed on the substrate 101, onwhich the upper pad electrode 144, the scan line SL, the gate electrode152 and 102, the storage electrode 126, the first connection part 164,and the anode 132 have been formed. The protective film 118 is formed ofan inorganic insulation material such as SiOx or SiNx. Subsequently, anorganic film such as photo-acrylic resin is applied on the entiresurface of the substrate 101, on which the protective film 118 has beenformed, and is then patterned through a photolithography process,thereby forming the bank 138. Subsequently, the protective film 118 ispatterned through an etching process using the bank 138 as a mask, withthe result that the protective film 118 is formed under the bank 138 andhas the same shape as the bank 138. Subsequently, the light-emittingstack 134 and the cathode 136 are sequentially formed in the active areaAA, rather than the pad area PA, through a deposition process using ashadow mask.

In embodiments of the present disclosure, a configuration in which thegate insulation film 114 is removed between each of the source and drainelectrodes 156, 106, 158, and 108 and the gate electrode 152 and 102 hasbeen described by way of example. Alternatively, as illustrated in FIG.5 , the gate insulation film 114 may be disposed between each of thesource and drain electrodes 156, 106, 158, and 108 and the gateelectrode 152 and 102. In this case, the source region 154S and 104S andthe drain region 154D and 104D of the active layer 154 and 104illustrated in FIG. 5 may be made conductive using an ultraviolet ray(UV). That is, after the upper pad electrode 144, the scan line SL, thegate electrode 152 and 102, the storage electrode 126, the firstconnection part 164, and the anode 132 are formed, an ultraviolet ray isradiated to the active layer 154 and 104, which is formed of an oxidesemiconductor material. As an ultraviolet ray is radiated to a portionof the active layer 154 and 104 that is exposed between each of thesource and drain electrodes 156, 106, 158 and 108 and the gate electrode152 and 102, a bond between metal and oxygen forming the active layer154 and 104 is destroyed, and the oxygen is separated from the metal. Inthis case, vacancies are generated in the metal due to the separation ofthe oxygen, and free electrons are generated. As a result, the sourceregion 154S and 104S and the drain region 154D and 104D, in which freeelectrons are generated, are formed at both sides of the channel region154C and 104C.

FIG. 6 is a plan view illustrating an organic light-emitting displaydevice according to a second embodiment of the present disclosure. FIG.7 illustrates cross-sectional views taken along lines IV-IV′, V-V′ andVI-VI′ in the organic light-emitting display device illustrated in FIG.6 .

The organic light-emitting display device according to the secondembodiment of the present disclosure illustrated in FIGS. 6 and 7 hasthe same constituent components as the organic light-emitting displaydevice illustrated in FIGS. 2 and 3 , except that the planarizationlayer 116 is disposed on the storage capacitor Cst. A detailedexplanation of the same constituent components will be omitted.

The drain electrode 158 of the switching thin-film transistor TSoverlaps the storage electrode 148, with the buffer layer 112 interposedtherebetween, with the result that the storage capacitor Cst is formed.The storage electrode 148 is disposed on the substrate 101 and is formedof the same material as the light-shielding layer 124. The storageelectrode 148 is connected to the drain electrode 108 of the drivingthin-film transistor TD.

The gate insulation film 114, the planarization layer 116, theprotective film 118, and the bank 138 are sequentially disposed on thestorage capacitor Cst. Here, because the gate insulation film 114 andthe planarization layer 116 are formed through the same mask process,the gate insulation film 114 and the planarization layer 116 have thesame shape and the same line width as each other. The planarizationlayer 116 is disposed at the intersection between the vertical line(e.g. the data line DL) and the horizontal line (e.g. the scan line SL),in the region in which the storage capacitor is disposed, and in theemission region in which the color filter 128 is disposed. Theplanarization layer 116 is not disposed in the driving circuit region Athat corresponds to the active layers 154 and 104 of the switching anddriving thin-film transistors TS and TD, so as not to overlap the activelayers 154 and 104 of the switching and driving thin-film transistors TSand TD.

FIGS. 8A to 8C are cross-sectional views illustrating in detail aprocess of manufacturing the gate insulation film and the planarizationlayer illustrated in FIG. 7 .

An organic film for planarization is applied on the substrate 101 havingthe color filter 128 formed by the manufacturing method illustrated inFIG. 4C thereon. Subsequently, the organic film is patterned through aphotolithography process using a halftone mask, with the result that theorganic film 116 a having a multi-stage structure is formed, asillustrated in FIG. 8A. The gate insulation film 114 and the bufferlayer 112 are patterned through an etching process using the organicfilm 116 a having a multi-stage structure as a mask, with the resultthat the pad contact hole 146, the source contact hole 162, the pixelcontact hole 120, and the light-shielding contact hole 122 are formed,as illustrated in FIG. 8B.

Subsequently, the organic film 116 a having a multi-stage structure isashed and becomes the planarization layer 116, which is disposed at theintersection between the scan line SL and the data line DL, on thestorage electrode 148, and on the color filter 128, as illustrated inFIG. 8C.

As described above, in the organic light-emitting display deviceaccording to the second embodiment of the present disclosure, theplanarization layer 116 and the gate insulation film 114 are formedthrough the same mask process. Accordingly, the second embodiment of thepresent disclosure may reduce the number of mask processes by a total ofat least three times compared to the related art, thereby simplifyingthe structure and manufacturing process of the device and consequentlyachieving enhanced productivity.

In embodiments of the present disclosure, the protective film 118 andthe planarization layer 138 may not be disposed in the pad region inwhich the conductive pad 140 is disposed, as illustrated in FIG. 3 , ormay be disposed so as to have therein a second pad contact hole 170 forexposing the upper pad electrode 144, as illustrated in FIG. 7 . Asillustrated in FIG. 7 , a stepped portion may be formed due to theprotective film 118 and the planarization layer 138, which are disposedso as to cover both sides of the upper pad electrode 144. Because thestepped portion may cause TAB process defects, the structure of theconductive pad 140 illustrated in FIG. 3 may be more suitable than thatillustrated in FIG. 7 .

Although the present disclosure has been described with reference to theorganic light-emitting display device, the present disclosure may alsobe applied to a display device having a thin-film transistor.

As is apparent from the above description, according to an organiclight-emitting display device of embodiments of the present disclosure,source and drain electrodes and an active layer may be formed throughthe same single mask process, and thus each of the source and drainelectrodes and the active layer are directly connected to each otherwithout a separate contact hole. Accordingly, it may be possible toreduce the total number of contact holes and thus improve an apertureratio by at least 28% compared to a structure in which each of sourceand drain electrodes and an active layer are connected to each otherthrough a contact hole.

In addition, source and drain electrodes and an active layer may beformed through the same single mask process, and a gate electrode and ananode may be formed through the same single mask process. Accordingly,it may be possible to reduce the number of mask processes by a total ofat least two times compared to the related art, thereby simplifying thestructure and manufacturing process of the device and consequentlyachieving enhanced productivity.

In addition, because a planarization layer and a gate insulation filmmay be formed through the same single mask process, it may be possibleto further reduce the number of mask processes.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the present disclosurewithout departing from the spirit or scope of the disclosure. Thus, itis intended that the present disclosure covers the modifications andvariations of this disclosure provided they come within the scope of theappended claims and their equivalents.

What is claimed is:
 1. An organic light-emitting display device,comprising: a substrate; a driving thin-film transistor including: anactive layer on the substrate; source and drain electrodes directlycontacting the active layer; a gate insulation film on the source anddrain electrodes and on the active layer; and a gate electrode on thegate insulation film; and an organic light-emitting element connected tothe driving thin-film transistor and including an anode, wherein thegate electrode of the driving thin-film transistor includes a firstportion of a transparent conductive layer, and the anode of the organiclight-emitting element includes a second portion of the same transparentconductive layer, the first portion being spaced apart from the secondportion, wherein the second portion of the transparent conductive layerdirectly contacts the drain electrode of the driving thin-filmtransistor via a contact hole through the gate insulation film.
 2. Theorganic light-emitting display device according to claim 1, furthercomprising: a switching thin-film transistor connected to the drivingthin-film transistor, the switching thin-film transistor including: anactive layer; a gate electrode including a third portion of thetransparent conductive layer, the third portion being spaced apart fromthe first and second portions; and source and drain electrodes, whereineach of the source and drain electrodes of the switching thin-filmtransistor exposes a respective side surface of the active layer of theswitching thin-film transistor.
 3. The organic light-emitting displaydevice according to claim 2, wherein an entire lower surface of each ofthe source and drain electrodes of at least one of the driving thin-filmtransistor and the switching thin-film transistor is in direct contactwith the active layer of at least one of the driving thin-filmtransistor and the switching thin-film transistor.
 4. The organiclight-emitting display device according to claim 2, further comprising:a scan line and a data line, each connected to the switching thin-filmtransistor; and a planarization layer between the scan line and the dataline, wherein the scan line includes a fourth portion of the transparentconductive layer.
 5. The organic light-emitting display device accordingto claim 4, further comprising: a lower pad electrode connected to atleast one of the scan line and the data line; and an upper pad electrodeconnected to the lower pad electrode, the upper pad electrode includinga fifth portion of the transparent conductive layer.
 6. The organiclight-emitting display device according to claim 5, wherein: the gateinsulation film has therein a pad contact hole exposing the lower padelectrode, and the upper pad electrode has a same line width as the gateinsulation film.
 7. The organic light-emitting display device accordingto claim 2, wherein: the gate electrode of the driving thin-filmtransistor further includes a first portion of an opaque conductivelayer on the first portion of the transparent conductive layer; and thegate electrode of the switching thin-film transistor further includes asecond portion of the opaque conductive layer on the third portion ofthe transparent conductive layer.
 8. The organic light-emitting displaydevice according to claim 7, further comprising: the gate insulationfilm between the gate electrode of each of the switching thin-filmtransistor and the driving thin-film transistor and the active layer ofeach of the switching thin-film transistor and the driving thin-filmtransistor; and a storage electrode overlapping the drain electrode ofthe switching thin-film transistor, with the gate insulation filminterposed therebetween.
 9. The organic light-emitting display deviceaccording to claim 8, wherein the storage electrode is formed from asixth portion of the same transparent conductive layer.
 10. The organiclight-emitting display device according to claim 8, further comprising aprotective film and a bank sequentially disposed on the storageelectrode.
 11. The organic light-emitting display device according toclaim 2, further comprising: a light-shielding layer overlapping thedriving thin-film transistor; a buffer layer between the light-shieldinglayer and the driving thin-film transistor; and a storage electrodeoverlapping the drain electrode of the switching thin-film transistor,with the buffer layer interposed therebetween.
 12. The organiclight-emitting display device according to claim 11, wherein the storageelectrode is formed of a same material as the light-shielding layer, andis in a same plane as the light-shielding layer.
 13. The organiclight-emitting display device according to claim 12, further comprisinga planarization layer, a protective film, and a bank sequentiallydisposed on the drain electrode of the switching thin-film transistor.14. The organic light-emitting display device according to claim 13,wherein the planarization layer has a same shape as the gate insulationfilm.
 15. The organic light-emitting display device according to claim1, wherein the portions of the active layer that are directly contactedby the source and drain electrodes are conductive, with a channel regiontherebetween.
 16. The organic light-emitting display device of claim 1,further comprising: a light shielding layer between the substrate andthe active layer of the driving thin-film transistor, wherein the secondportion of the transparent conductive layer directly contacts the lightshielding layer.
 17. An organic light-emitting display device,comprising: a substrate; a driving thin-film transistor including: anactive layer on the substrate; source and drain electrodes directlycontacting the active layer; a gate insulation film on the source anddrain electrodes and on the active layer; and a gate electrode on thegate insulation film; and an organic light-emitting element connected tothe driving thin-film transistor and including an anode, wherein thegate electrode of the driving thin-film transistor includes a firstportion of a transparent conductive layer, and the anode of the organiclight-emitting element is formed of a second portion of the sametransparent conductive layer, the first portion being spaced apart fromthe second portion, wherein the second portion of the transparentconductive layer directly contacts the drain electrode of the drivingthin-film transistor via a contact hole through the gate insulationfilm, and wherein an entire lower surface of each of the source anddrain electrodes overlaps the active layer.